Dr Matthias Sobiech from OC Oerlikon Balzers AG.

XRD stress analysis on modern high performance CrN thin films suitable for tribological applications were perfomed at OC Oerlikon Balzers on a state of the art diffractometer equipped with a FOX 2D Cu 12_INF optic.

This application note demonstrates the capability of a state of the art XRD set-up to perform advanced stress measurements on high performance thin films (stress depth profiling) when equipped with advanced X-ray optics providing a 2 dimensional parallel X-ray beam.

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