X-ray photoelectron spectroscopy (XPS, also called electron spectroscopy for chemical analysis, ESCA) is an electron spectroscopy method that uses X-rays to eject electrons from inner-shell orbitals. The analysis of the emitted photoelectrons energy spectrums (energy and intensity) provides a quantitative analysis of the surface composition (element and composition). The technique is very surface sensitive and depth profiling can be done with angle resolved XPS. In order to achieve high resolution and high count rates, X-ray sources are coupled with X-ray monochromators (crystals and multilayer optics). Xenocs has the unique capability to provide easy to use single reflection X-ray multilayer optics that give a high monochromatic flux projected to a small spot, enabling fast and spatially resolved measurements.

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