GeniX CU Small Spot uses a high brilliance micro focus X-ray source efficiently coupled with an industry proven single Bragg reflection multilayer Xenocs optic. The optic images the source with unity magnification, thus achieving a very small spot at the focus with minimal convergence.

The proprietary cooling system and smart power management extend the source lifetime and enable fast operation. The intuitive user interface and extendibility of the GeniX command and control unit provide powerful functionality for either standalone or integrated use.

Due to its unprecedented stability and reliability, GeniX CU Small Spot is a system with the performance class of a conventional high power rotating anode source and the reliability, low maintenance, and low capital and operating cost of traditional sealed tubes.

GeniX CU Small Spot replaces traditional systems. It provides a clear advantage for a number of applications for which the small spot/high flux combination is required. Examples include small area analysis (mapping) or product-wafer semiconductor metrology.

If you have any questions or if you would like to know more about the GeniX CU Small Spot solution please contact us.